Crystalline Size Effects on Texture Coefficient,Electrical and Optical Properties of Sputter-deposited Ga-doped ZnO Thin Films

作     者：Yaqin Wang Wu Tang Lan Zhang 

作者机构：State Key Laboratory of Electronic Thin Films and Integrated DevicesUniversity of Electronic Science and Technology of China State Key Laboratory for Mechanical Behavior of MaterialsXi'an Jiaotong University 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2015年第31卷第2期

页      面：175-181页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China (No.51071038) Sichuan Province Science Foundation for Youths (No.2010JQ0002) State Key Laboratory for Mechanical Behavior of Materials,Xi’an Jiaotong University,China (No.20131309) 

主　　题：Ga-doped ZnO film Crystalline size Texture coeffic 

摘      要：C-axis oriented Ga-doped ZnO(GZO) films with various thicknesses were deposited on glass substrate by radio frequency(RF) magnetron sputtering. The dependence of crystal structure,electrical,and optical properties of the GZO films on crystalline size were systematically studied. The results showed that the texture coefficient of (002) peak (TC(002)) decreases with increasing crystalline size. The Hall mobility m was reciprocal to electron effective mass and the fitted relaxation time s was 0.11±0.01 ms. With the increase of average crystalline size,the resistivity increased slightly,which is caused by the competition of (002) and(101) plane,introducing in some defects and leading to carrier density reduction. The optical band gap was in the range from 3.454 to 3.319 eV with increasing crystalline size from 26.96 to 30.88 nm,showing a negative relationship. The dependence of optical band gap (Eopg) on the crystalline size(R) can be qualitatively explained by a quantum confinement effect. The relationship between Eopg and R of GZO films suggests that tuning up optical properties for desired applications can be achieved by controlling the crystalline size.