Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

作     者：Yan WANG Zhimin LIU Lizhen LIANG Chundong HU 王艳;刘智民;梁立振;胡纯栋

作者机构：Institute of Plasma PhysicsChinese Academy of SciencesHefei 230031.People's Republic of China University of Science and Technology of China.Hefei 230026.People's Republic of China 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2019年第21卷第4期

页      面：155-160页

核心收录：

学科分类：08[工学] 0827[工学-核科学与技术] 

基　　金：supported in part by National Natural Science Foundation of China National Key R&D Program of China the Key Program of Research and Development of Hefei Science Center, CAS 

主　　题：optical emission spectroscopy neutral beam injection RF negative ion source 

摘      要：Optical emission spectroscopy(OES)using the trace rare gases of Ar and Xe have been carried out in a radio frequency(RF)driven negative ion source at Institute of Plasma Physics,Chinese Academy of Science(ASIPP),in order to determine the electron temperature and density of the hydrogen *** line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma *** spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona *** argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative *** has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF *** to the experimental results,the typical plasma parameters isTe2≈2-4 eV and ne≈1 x 1017-8 x 1017 m^-3 in front of plasma grid.