Characteristics of SnO_(2):F Thin Films Deposited by Ultrasonic Spray Pyrolysis:Effect of Water Content in Solution and Substrate Temperature

作     者：Mario Alberto Sánchez-García Arturo Maldonado Luis Castañeda Rutilo Silva-González María de la Luz Olvera 

作者机构：Institute of PhysicsNational Autonomous University of Mexico(UNAM)Apartado Postal 20-364México D.F.04510Mexico Electrical Engineering DepartmentSolid State Electronics SectionApartado 14740México D.F.07360Mexico Institute of PhysicsAutonomous Meritorious University of PueblaApartado Postal J-48Puebla 72570Mexico 

出 版 物：《Materials Sciences and Applications》 (材料科学与应用期刊（英文）)

年 卷 期：2012年第3卷第10期

页      面：690-696页

学科分类：1002[医学-临床医学] 100214[医学-肿瘤学] 10[医学] 

基　　金：This work was partially supported by CONACyT under contract Number 166601 

主　　题：Tin Oxide Ultrasonic Spray Pyrolysis Transparent Conducting Oxides TCO 

摘      要：Fluorine doped tin oxide, SnO2:F, thin films were deposited by ultrasonic chemical spray starting from tin chloride and hydrofluoric acid. The physical characteristics of the films as a function of both water content in the starting solution and substrate temperature were studied. The film structure was polycrystalline in all cases, showing that the intensity of (200) peak increased with the water content in the starting solution. The electrical resistivity decreased with the water content, reaching a minimum value, in the order of 8 × 10-4 Ωcm, for films deposited at 450℃ from a starting solution with a water content of 10 ml per 100 ml of solution;further increase in water content increased the corresponding resistivity. Optical transmittances of SnO2:F films were high, in the order of 75%, and the band gap values oscillated around 3.9 eV. SEM analysis showed uniform surface morphologies with different geometries depending on the deposition conditions. Composition analysis showed a stoichiometric compound with a [Sn/O] ratio around 1:2 in all samples. The presence of F into the SnO2 lattice was detected, within 2 at % respect to Sn.