Manufacturing tolerant topology optimization

作     者：Ole Sigmund 

作者机构：Department 

出 版 物：《Acta Mechanica Sinica》 (力学学报（英文版）)

年 卷 期：2009年第25卷第2期

页      面：227-239页

核心收录：

学科分类：0202[经济学-应用经济学] 02[经济学] 020205[经济学-产业经济学] 0802[工学-机械工程] 0701[理学-数学] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：Danish Center for Scientific Computing V. Kann Rasmussen Foundation, VKRF European Social Fund, ESF 

主　　题：Topology optimization Robust designCompliant mechanisms Manufacturing constraints 

摘      要：In this paper we present an extension of the topology optimization method to include uncertainties during the fabrication of macro, micro and nano structures. More specifically, we consider devices that are manufactured using processes which may result in （uniformly） too thin （eroded） or too thick （dilated） structures compared to the intended topology. Examples are MEMS devices manufactured using etching processes, nano-devices manufactured using e-beam lithography or laser micro-machining and macro structures manufactured using milling processes. In the suggested robust topology optimization approach, under- and over-etching is modelled by image processing-based ＂erode＂ and ＂dilate＂ operators and the optimization problem is formulated as a worst case design problem. Applications of the method to the design of macro structures for minimum compliance and micro compliant mechanisms show that the method provides manufacturing tolerant designs with little decrease in performance. As a positive side effect the robust design formulation also eliminates the longstanding problem of one-node connected hinges in compliant mechanism design using topology optimization.