STRUCTURE AND SURFACE STUDIES OF Mg_xZn_(1-x)O FILMS GROWN BY PULSED LASER DEPOSITION

作     者：L.Zhuang K.H.Wong 

作者机构：DepartmentofAppliedPhysicsTheHongKongPolytechnicUniversityKowloonHongKongChina 

出 版 物：《Acta Metallurgica Sinica(English Letters)》 (金属学报（英文版）)

年 卷 期：2005年第18卷第3期

页      面：237-241页

核心收录：

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：the Research Grants Council of the Hong Kong Special Administrative Region(B-Q577) 

主　　题：pulsed laser deposition thin film XRD MgxZn1-xO 

摘      要：The structural and surface properties of high-quality epitaxial cubic MgxZn1-xO films deposited by pulsed laser deposition (PLD) were studied by X-ray diffracti on and atomic force microscopy respectively. For films of about 500nm thick, sca ns over a 30μm × 30μm area revealed a surface roughness Ra of about 100nm. Th is relatively large surface roughness is primarily attributed to the particulate and outgrowth during the PLD process. A good epitaxial growth on LaAlO3 (LAO ) (100) substrates, however has been obtained for composition x = 0.9, 0.7 and 0 .5 with the heteroepitaxial relationship of (100)■∥(100)LAO (out-of-plane) and (011)■∥(010)LAO (in-plane). These structural qualities suggest that cubic Mgx Zn1-xO alloys films have good potential in a variety of optoelectronic device ap plications.