Effective parameters on diameter of carbon nanotubes by plasma enhanced chemical vapor deposition

作     者：Kang Young JEONG Hyun Kyung JUNG Hyung Woo LEE 

作者机构：National Core Research Center for Hybrid Materials SolutionHybrid Graduate SchoolPusan National University Department of Diagnostic RadiologyInje University College of MedicineHaeundae Paik Hospital 

出 版 物：《中国有色金属学会会刊：英文版》 (Transactions of Nonferrous Metals Society of China)

年 卷 期：2012年第22卷第S3期

页      面：712-716页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：Project supported by a 2-Year Research Grant of Pusan National University Project(2011-0006257)supported by National Core Research Center(NCRC)Program through the National Research Foundation of Korea funded by the Ministry of Education,Science and Technology 

主　　题：carbon nanotubes catalytic film thickness pretreatment plasma power plasma enhanced chemical vapor deposition 

摘      要：The effective parameters on the diameter of carbon nanotubes (CNTs) by plasma enhanced chemical vapor deposition (PECVD) were *** lots of influential parameters,the effects of the catalytic film thickness and the pretreatment plasma power on the growth of CNTs were *** results show that the size of catalytic islands increases by increasing the thickness of catalytic layer,but the density of CNTs *** pretreatment duration time of 30 s is the optimal condition for growing CNTs with about 50 nm in *** increasing the pretreatment plasma power,the diameter of CNTs decreases ***,the diameter of CNTs does not change drastically from 80 to 120 *** uniformly grown CNTs with the diameter of 50 nm are obtained at the pretreatment plasma power of 100 W.