A Novel Integrated PZT-Driven Micropump and Microvalve

作     者：Zhaoxin Geng Dafu Cui Haining Wang Changchun Liu Bo Su 

作者机构：State Key Lab. of Transducer Tech. Inst. of Electronics Chinese Academy of Sciences Beijing 100080 China 

出 版 物：《稀有金属材料与工程》 (Rare Metal Materials and Engineering)

年 卷 期：2006年第35卷第A3期

页      面：540-542页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：the financial support from the National Science Foundation of China(Grant No.20299030 60427001 and 60501020) 

主　　题：micropump microvalve PZT PDMS 

摘      要：According to the elastic buffer mechanism and the variable gap mechanism ,a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon *** thickness of the micropump membrance is about 180μ*** diameter and the depth of micropump chamber cavity are 6 mm and 40μm,*** performances of the micropump,such as pump rate and backpressure,were *** a flow-rectifying element,the diffusers and active valve were used instead of passive check *** flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.