Low-cost and versatile integration of microwire electrodes and optical waveguides into silicone elastomeric devices using modified xurographic methods

作     者：Juncong Liu James B Mahony Ponnambalam Ravi Selvaganapathy 

作者机构：Department of Mechanical EngineeringMcMaster UniversityHamiltonOntario L8S 4L7Canada Department of Pathology and Molecular MedicineMcMaster UniversityHamiltonOntario L8S 4K1Canada School of Biomedical EngineeringMcMaster UniversityHamiltonOntario L8S4K1Canada 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2017年第3卷第1期

页      面：107-113页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

基　　金：supported by NSERC and CIHR through CHRP funding Canada Research Chairs program and Discovery Accelerator supplement Award 

主　　题：lab on a chip microelectrode polydimethylsiloxane(PDMS) xurography 

摘      要：Microelectrodes are used in microfluidic devices for a variety of purposes such as heating,applying electric fields,and electrochemical ***,they are still manufactured by expensive deposition techniques such as sputtering or evaporation and patterned using photolithography *** recently,alternate methods including nanoparticle sintering and use of liquid metal flowing through microchannels have been used to fabricate *** methods are limited in the material choices or require post processing to be integrated into *** we developed a low-cost and versatile method to integrate high-quality metal microwires into polydimethylsiloxane(PDMS)using *** microwire integration process includes cutting slit pattern on PDMS substrate and subsequent writing metal microwires into the slit pattern using a specialized *** the microwire-integrated PDMS was sealed/bonded using uncured PDMS *** method enables integration of metal microwires of diameter as small as 15μm into PDMS *** of multiple microwires with minimum spacing of 150μm has also been *** versatility of this method is demonstrated by the fabrication of metal microwire suspended in the middle of the microchannel,which is difficult to achieve using conventional electrode fabrication *** low-cost method avoids expensive clean room fabrication yet producing high-quality electrodes and can be used in a variety of microfluidic and MEMS applications.