Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

作     者：王战 高巍 张彭 闫慧杰 任春生 

作者机构：AVIC Shenyang Aircraft Design & Research Institute School of Physics and Optoelectronic TechnologyDalian University of Technology 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2015年第17卷第3期

页      面：191-195页

核心收录：

学科分类：07[理学] 0805[工学-材料科学与工程（可授工学、理学学位）] 070204[理学-等离子体物理] 0702[理学-物理学] 

基　　金：supported by National Natural Science Foundation of China(No.11475038) 

主　　题：ICP DC discharge Langmuir probe plasma characteristic 

摘      要：In this paper, the double-discharge plasma generated by radio frequency （RF） and direct current （DC） has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.