Micromechanical resonator with dielectric nonlinearity

作     者：Farrukh Mateen Joseph Boales Shyamsunder Erramilli Pritiraj Mohanty 

作者机构：Department of Mechanical and Aerospace EngineeringBoston University110 Cummington StreetBostonMA 02215USA Department of PhysicsBoston University590 Commonwealth AvenueBostonMA 02215USA 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2018年第4卷第1期

页      面：263-269页

核心收录：

学科分类：07[理学] 0701[理学-数学] 070101[理学-基础数学] 

主　　题：dielectric optics nonlinear 

摘      要：Nonlinear response of dielectric polarization to electric field in certain media is the foundation of nonlinear ***,such nonlinearities are observed at high light intensities,achievable by laser,where atomic-scale field strengths exceeding 10^(6)–10^(8) V/m can be *** optics includes a host of fascinating phenomena such as higher harmonic frequency generation,sum and difference frequency generation,four-wave mixing,self-focusing,optical phase conjugation,and optical *** though nonlinear optics has been studied for more than five decades,such studies in analogous acoustic or microwave frequency ranges are yet to be ***,we demonstrate a nonlinear dielectric resonator composed of a silicon micromechanical resonator with an aluminum nitride piezoelectric layer,a material known to have a nonlinear optical *** a novel multiport approach,we demonstrate second and third-harmonic generation,sum and difference frequency generation,and four-wave *** demonstration of a nonlinear dielectric resonator opens up unprecedented possibilities for exploring nonlinear dielectric effects in engineered structures with an equally broad range of effects such as those observed in nonlinear ***,integration of a nonlinear dielectric layer on a chip-scale silicon micromechanical resonator offers tantalizing prospects for novel applications,such as ultra high harmonic generation,frequency multipliers,microwave frequency-comb generators,and nonlinear microwave signal processing.