Preparation of double-sided biaxially textured magnesium oxide thin films

作     者：Hao Tang Yin-Chang Ma Rui-Peng Zhao Bo-Wan Tao Hao Tang;Yin-Chang Ma;Rui-Peng Zhao;Bo-Wan Tao

作者机构：State Key Laboratory of Electronic Thin Films and Integrated DevicesUniversity of Electronic Science and Technology of ChinaChengdu610054China 

出 版 物：《Rare Metals》 (稀有金属（英文版）)

年 卷 期：2023年第42卷第6期

页      面：2075-2080页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：financially supported by the National High Technology Research and Development Program of China (No.2014AA032702) 

主　　题：Coated conductors IBAD-MgO Doublesided Automatic flipping 

摘      要：A high-efficiency system was designed as an improvement in conventional reel-to-reel system for ion beam-assisted deposition(IBAD) and homo-epitaxy of double-sided biaxially textured MgO thin *** system enables Hastelloy tape to flip automatically and go through the deposition area twice in order to deposit MgO on its both *** this system,the output of doublesided IB AD-MgO is elevated to be 30 m·h^(-1).A 30-m tapes with 10-nm-thick double-sided biaxially textured MgO thin films was successfully made.X-ray diffraction(XRD) and atomic force microscope(AFM) show identical quality of MgO thin films on both *** yield full width at half maximum values of out-of-plane texture and in-plane texture on both sides are approximately 3.1° and 5.3°,***,the influence of ion beam flux and deposition rate on the texture of thin film was investigated.A process window in which biaxial texture can be obtained is found for large-scale production.