Problems on fabrication of computer-generated holograms for testing aspheric surfaces

作     者：马骏 高志山 朱日宏 何勇 陈磊 李建欣 潘裕斌 W.H.Wong 黄立辉 谢常青 朱效立 马杰 

作者机构：Department of Optical EngineeringNanjing University of Science and Technology Department of Electronic EngineeringCity University of Hong KongKowloon Tang Key Laboratory of Nano-Fabrication and Novel Devices Integrated TechnologyInstitute of MicroelectronicsChinese Academy of Sciences 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2009年第7卷第1期

页      面：70-73页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

主　　题：Computer generated holography Electron holography Holograms Interferometry Masks Optical testing Probability density function 

摘      要：Interferometric optical testing using computer-generated hologram （CGH） can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH＇s surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometrie test results of an aspherie surface show that the whole test system obtains the demanded accuracy.