A micromechanical bridge-shaped voltage-controlled oscillator

作     者：HAN Jianqiang ZHU Changchun ZHAO Hongpo LIU Junhua SHAO Jun 

作者机构：Xi'an Jiaotong University Xi'an 710049 China Xi'an Jiaotong University Xi'an 710049 China Xi'an Jiaotong University Xi'an 710049 China Xi'an Jiaotong University Xi'an 710049 China Xi'an Jiaotong University Xi'an 710049 China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2004年第47卷第1期

页      面：26-32页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：This work supported by the National Natural Science Foundation of China(Grant No.60036016) by National 863 Project of China under Grant No.2001AA313090 

主　　题：voltage-controlled oscillator, microbridge, resonator, MEMS. 

摘      要：A novel micromechanical bridge-shaped voltage-controlled oscillator with high Q value was fabricated. The core of this kind of oscillators is an electrothermally excited and piezoresistively detected micromechanical bridge resonator. Its resonance frequency can be adjusted by changing the DC voltage applied to the Wheatstone bridge. Theoretical analysis and experimental data show that its resonance frequency is linear with the square of the DC voltage. The linearity is better than 0.16% and the adjustable frequency range excels 17.15%.