Experimental Study of Perfectly Patterned Silica-Titania Optical Waveguide

作     者：Rimlee DEB ROY Devika SIL Sunirmal JANA Prasanta Kumar BISWAS Shyamal Kumar BHADRA 

作者机构：Fiber Optics & Photonics Division Central Glass & Ceramic Research Institute 196 Raja S. C. Mullick Road Jadavpur Kolkata-700 032 India Sol-Gel Division Central Glass & Ceramic Research Institute 196 Raja S. C. Mullick Road Jadavpur Kolkata-700 032 lndia Department of Chemistry Temple University Philadelphia PA 19122 USA 

出 版 物：《Photonic Sensors》 (光子传感器（英文版）)

年 卷 期：2012年第2卷第1期

页      面：81-91页

核心收录：

学科分类：081702[工学-化学工艺] 08[工学] 0817[工学-化学工程与技术] 0803[工学-光学工程] 

基　　金：Department of Science & Technology (DST)  Govt. of India 

主　　题：Optical properties sol-gel technique thin films oxides 

摘      要：Inorganic silica-titania thin films with thicknesses 150 nm-200 nm are deposited on high purity and polished silicon wafer and silica glass substrates by sol-gel dipping process and are patterned by capillary force lithography technique. Subsequently grating structure is embossed in green stage. The patterned gel films are subjected to stepwise heat treatment to 500 ℃ and above in pure oxygen atmosphere in order to achieve major conversion of mixed-gel to oxide optical films which are characterized by Ellipsometry, Fourier transform infrared spectroscopy （FTIR） and atomic force microscopy （AFM） to optimize the fabrication parameters and to get perfectly matched film. Removal of organics and formation of perfectly inorganic silica-titania network at optimized heat treatment in controlled environment are ensured by FTIR spectral study. The difference in refractive indices between the substrate and coated film as developed waveguides for operating wavelength show the planar waveguide behavior of the films. calculated theoretically matches exactly with the （632.8 nm） and the measured optical properties