1×4 MMI Splitter Based on Rib SOI Waveguide
1×4 MMI Splitter Based on Rib SOI Waveguide出 版 物:《Chinese Journal of Lasers》 (中国激光(英文版))
年 卷 期:2000年第6期
页 面:46-51页
学科分类:070207[理学-光学] 07[理学] 0702[理学-物理学]
基 金:SupportedbytheNationalNaturalScienceFoundationofChinaundergrantNo .6 9896 2 6 0andNo .6 9990 5 40
主 题:SOI multimode interference splitter integrated opt?
摘 要:In this paper, a 1×4 MMI splitter based on silicon on insulator (SOI) by effective index method and guide mode method is designed. The fabrication tolerance was analyzed. The device was fabricated and near field output was obtained.