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1×4 MMI Splitter Based on Rib SOI Waveguide

1×4 MMI Splitter Based on Rib SOI Waveguide

作     者:Supported by the National Natural Science Foundation of China under grant No.69896260 and No.69990540.WEI Hongzhen 1 YU Jinzhong 1 LIU Zhongli 2 Wang Qiming 1 FANG Changshui 3 ( 1 State Key Laboratory on Integrated optoelectronics, Institu 

出 版 物:《Chinese Journal of Lasers》 (中国激光(英文版))

年 卷 期:2000年第6期

页      面:46-51页

学科分类:070207[理学-光学] 07[理学] 0702[理学-物理学] 

基  金:SupportedbytheNationalNaturalScienceFoundationofChinaundergrantNo .6 9896 2 6 0andNo .6 9990 5 40 

主  题:SOI multimode interference splitter integrated opt? 

摘      要:In this paper, a 1×4 MMI splitter based on silicon on insulator (SOI) by effective index method and guide mode method is designed. The fabrication tolerance was analyzed. The device was fabricated and near field output was obtained.

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