Extraction of Surface Roughness from the Central δ-peak of Light Scattering Using a Multi-wavelength Ar~+ Laser

作     者：LIU Deli QI Dongping CHENG Chuanfu (Department of Physics, Shandong Normal University, Jinan 250014, China) 

作者机构：山东师范大学 山东 济南 

出 版 物：《Chinese Journal of Lasers》 (中国激光(英文版))

年 卷 期：2000年第9卷第3期

页      面：22-27页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：SupportedbytheNationalNaturalScienceFudationofChina (GrandNo .6 99780 12 ) 

主　　题：random surface roughness light scattering multi-wavelength 

摘      要：In this paper, a new light scattering method for measuring t he roughness of random surfaces is proposed. The method is based on the relation between the specularly reflected intensity I s, i.e., the central δ-peak intensity and wave vector component k z. The linear fit of the logarithm graph of the normalized central δ-peak intensity I sr versus k-2 z, whose variation is induced by changing illuminating wavelength, gives the square of the surface roughness w. The roughnesses of 6 silicon backside samples were measured.