Chirped coupled ridge waveguide quantum cascade laser arrays with stable single-lobe far-field patterns

作     者：YUE ZHAO JIN-CHUAN ZHANG CHUAN-WEI LIU NING ZHUO SHEN-QIANG ZHAI LI-JuN WANG JuN-QI LIU SHU-MAN LIU FENG-QI LIU ZHAN-GUO WANG 

作者机构：Key Laboratory of Semiconductor Materials Science Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices Beijing 100083 China College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences Beijing 101408 China 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2018年第6卷第8期

页      面：821-824页

核心收录：

学科分类：080904[工学-电磁场与微波技术] 0808[工学-电气工程] 080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0810[工学-信息与通信工程] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080402[工学-测试计量技术及仪器] 0805[工学-材料科学与工程（可授工学、理学学位）] 081001[工学-通信与信息系统] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China(NSFC)(61435014,61574136,61627822,61774146,61790583) Chinese Academy of Sciences Key Project(CAS Key Project)(QYZDJ-SSW-JSC027,ZDRW-XH-2016-4) Natural Science Foundation of Beijing Municipality(4172060) 

主　　题：量子级联激光器 通讯技术 发展现状 技术创新 

摘      要：Power scaling in a broad area quantum cascade laser(QCL) tends to deteriorate beam quality with the emission of a multiple-lobe far-field pattern. In this paper, we demonstrate a coupled ridge waveguide QCL array consisting of five elements with chirped geometry. In-phase mode operation is secured by managing supermode loss with properly designed geometries of ridges. A single-lobe lateral far-field with a near diffraction limited beam pattern was obtained in the whole current dynamic range. The devices were fabricated with the wet and dry etching method. The regrowth technique of the In P:Fe insulation layer and In P:Si waveguide layer was *** a structure has the potential to optimize the beam quality of the recently reported high-power broad-area QCL with a reduced cascade number.