A SIMULATION STUDY OF LOW ENERGY SPUTTERING ANGULAR DISTRIBUTION

作     者：ZHENG Liping CUI Fuzhai 郑里平;崔福斋

作者机构：Institute of Nuclear ResearchAcademia SinicaShanghai Ion-Beam LaboratoryInstitute of MetallurgyAcademia SinicaShanghai Department of Engineering PhysicsQinghua UniversityBeijing 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：1988年第5卷第4期

页      面：145-148页

学科分类：07[理学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0704[理学-天文学] 070202[理学-粒子物理与原子核物理] 0702[理学-物理学] 

主　　题：energy. angular distribution 

摘      要：The low energy sputtering angular distributions are simulated in inert gas ion-metal target *** is found that the angular distribution of PKAs trends to an under-cosine shape,while the angular distribution of SKAs shows either a cosine one or an over-cosine one:the formation of the under-cosine sputtering angular distribution seems to come from the smaller mass ratio and the lower incident energy.