Ultra-precision figuring using submerged jet polishing
Ultra-precision figuring using submerged jet polishing作者机构:Institute of Optics and ElectronicsChinese Academy of Sciences
出 版 物:《Chinese Optics Letters》 (中国光学快报(英文版))
年 卷 期:2011年第9卷第9期
页 面:64-66页
核心收录:
学科分类:0808[工学-电气工程] 0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 081101[工学-控制理论与控制工程] 0811[工学-控制科学与工程] 0702[理学-物理学]
基 金:supported by the National Natural Science Foundation of China under Grant No. 60808017
摘 要:A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 λ to 0.024 ), (λ = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.