Ultra-precision figuring using submerged jet polishing

作     者：施春燕 袁家虎 伍凡 万勇建 

作者机构：Institute of Optics and ElectronicsChinese Academy of Sciences 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2011年第9卷第9期

页      面：64-66页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 081101[工学-控制理论与控制工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China under Grant No. 60808017 

主　　题：Optical glass 

摘      要：A new removal optimization method called submerged jet polishing （SJP） is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic （PV） 0.066 λ to 0.024 ）, （λ = 632.8 nm） after three iterations, and the root mean square （RMS） value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.