Performance evaluation of an SOI pixel sensor with in-pixel binary counters

作     者：Longlong Song Yunpeng Lu Ryo Hashimoto Ryutaro Nishimura Shunji Kishimoto Yang Zhou Zhigang Wu Yasuo Arai Qun Ouyang 

作者机构：State Key Laboratory of Particle Detection and Electronics(Institute of High Energy PhysicsCAS)Beijing 100049China University of Chinese Academy of SciencesBeijing 100049China Institute of Materials Structure ScienceKEK1-1 OhoTsukubaIbaraki 305-0801Japan School of High Energy Accelerator ScienceSOKENDAI1-1 OhoTsukubaIbaraki 305-0801Japan Institute of Particle and Nuclear StudiesKEK1-1 OhoTsukubaIbaraki 305-0801Japan 

出 版 物：《Radiation Detection Technology and Methods》 (辐射探测技术与方法（英文）)

年 卷 期：2018年第2卷第1期

页      面：80-86页

学科分类：07[理学] 070202[理学-粒子物理与原子核物理] 0702[理学-物理学] 

基　　金：This work is supported by the National Nature Science Foundation of China Grant Nos.11375226 and 11575220 

主　　题：Double SOI X-ray imaging detectors Photon counting Pixel detector 

摘      要：Introduction Pixel detectors fabricated with the silicon-on-insulator(SOI)technology suffered from the digital pickup,due to the capacitive coupling between the sensing electrode and the in-pixel *** order to tackle this issue,an advanced process called double SOI has been developed.A prototype chip CPIXTEG3b adopting this new process was designed and *** optimization concerning the double-SOI design and testing of the single pixel were already presented in a separate publication,this paper focuses on its noise performance of the full matrix and X-ray detection utilizing a synchrotron photon *** Equivalent noise charge(ENC)of the full pixel matrix was measured with electrical pulse *** threshold dispersion was minimized by the DAC tuning in each individual *** a photon-counting X-ray imager,noise count accumulated up to 1 h was *** efficiency was measured with a micro-focused beam as well as a flat field generated by the X-ray scattering on a glassy carbon at the KEK PF beam line *** The typical ENC is 52 e−and the sigma of threshold dispersion is 10 e−over the full matrix.A merit of“zeronoise count is also demonstrated,which is consistent with the low *** prototype chip has been tested with microbeam and used to measure the beam profile to be with a full width of 50µm at 2.4%of the maximum *** sensor depletion and charge sharing between neighboring pixels have been carefully characterized,providing insights for further *** homogeneity of response to X-ray photons has been demonstrated in the flat field *** work has drawn a final conclusion to the solution of digital pickup issue and opened a promising prospect in low-noise and high-resolution X-ray imaging.