Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry

作     者：Ju Cheng Jian Lu Hong-Chao Zhang Feng Lei Maryam Sardar Xin-Tian Bian Fen Zuo Zhong-Hua Shen Xiao-Wu Ni Jin Shi 程菊;陆建;张宏超;雷枫;Maryam Sardar;边心田;左芬;沈中华;倪晓武;施锦

作者机构：School of ScienceNanjing University of Science and TechnologyNanjing 210094 School of Physics and Electronic Electrical EngineeringHuaiyin Normal UniversityHuai＇an 223001 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2018年第35卷第5期

页      面：20-24页

核心收录：

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：Supported by the National Natural Science Foundation of China under Grant No 11604115 the Educational Commission of Jiangsu Province of China under Grant No 17KJA460004 the Huaian Science and Technology Funds under Grant No HAC201701 

主　　题：Figure FFT Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry 

摘      要：The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the *** present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution,to extend the measurable transparent film thickness. A large measuring range up to 385 m in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple,easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.