Corrosion behaviors of the copper alloy electrodes in Ar F excimer laser operation process

作     者：Xin Guo Jinbin Ding Yi Zhou Yu Wang 

作者机构：Academy of Opto-Electronics Chinese Academy of Sciences Beijing 100094 China Beijing Excimer Laser Technology and Engineering Center Beijing 100094 China 

出 版 物：《High Power Laser Science and Engineering》 (高功率激光科学与工程（英文版）)

年 卷 期：2018年第6卷第1期

页      面：51-57页

核心收录：

学科分类：07[理学] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China under Grant No. 61705235 

主　　题：Ar F excimer laser corrosion behavior electrode impurity trace element 

摘      要：The corrosion behaviors of the Ar F excimer laser copper alloy electrodes were studied. The morphology, composition and impurities were characterized by optical microscope, scanning electron microscopy, electron microprobe and glow discharge mass spectrometer methods. The anode produces the reef, the corrosion pits, the hole layer and the 1–10 μm level flake impurity. The cathode produces the particles, the sputtering pits, the element reduce layer and the 1 μm level particle impurity. Besides the Cu element, other elements in the alloy participate in the corrosion: Al element in the reef is over 1.5 times of the anode, Zn element in the particles is 1.3 times of the cathode, many trace elements congregate on the copper surface several and even hundreds of times. These elements are responsible to a great degree for the impurities and the rapid energy decline of the long-time idled laser.