Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University

作     者：WenBin Wu HaiTao Ren ShiXiang Peng Yuan Xu JiaMei Wen Tao Zhang JingFeng Zhang AiLin Zhang Jiang Sun ZhiYu Guo JiaEr Chen 

作者机构：State Key Laboratory of Nuclear Physics and Technology & Institute of Heavy Ion Physics Peking University 

出 版 物：《Science China(Physics,Mechanics & Astronomy)》 (中国科学：物理学、力学、天文学（英文版）)

年 卷 期：2018年第61卷第4期

页      面：69-74页

核心收录：

学科分类：07[理学] 070204[理学-等离子体物理] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.11775007,and 11575013) The support from State Key Laboratory of Nuclear Physics and Technology,Peking University is appreciated 

主　　题：electron cyclotron resonance ion source(ECRIS) hydrogen plasma optical emission spectroscopy dissociation degree of hydrogen vibrational temperature 

摘      要：A quartz-chamber 2.45 GHz electron cyclotron resonance ion source(ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 m A hydrogen ion beam at 50 k V with a duty factor of 10%. The root-mean-square(RMS) emittance of this beam is less than 0.12π mm mrad. In our initial work,the electron temperature and electron density inside the plasma chamber had been measured with the line intensity ratio of noble gases. Based on these results, the atomic and molecular emission spectra of hydrogen were applied to determine the dissociation degree of hydrogen and the vibrational temperature of hydrogen molecules in the ground state, respectively. Measurements were performed at gas pressures from 4×10^(-4) to 1×10^(-3) Pa and at input peak RF power ranging from 1000 to 1800 W. The dissociation degree of hydrogen in the range of 0.5%-10% and the vibrational temperature of hydrogen molecules in the ground state in the range of 3500-8500 K were obtained. The plasma processes inside this ECRIS chamber were discussed based on these results.