Deposition of Phase-pure Cr2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions
Deposition of Phase-pure Cr_2AlC Coating by DC Magnetron Sputtering and Post Annealing Using Cr-Al-C Targets with Controlled Elemental Composition but Different Phase Compositions作者机构:Shenyang National Laboratory for Materials ScienceInstitute of Metal ResearchChinese Academy of SciencesShenyang 110016China University of Chinese Academy of SciencesBeijing 100039China
出 版 物:《Journal of Materials Science & Technology》 (材料科学技术(英文版))
年 卷 期:2018年第34卷第3期
页 面:466-471页
核心收录:
学科分类:080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)]
基 金:supported by the National Natural Science Foundation of China under Grant Nos.51271191 51571205 and 51401209
主 题:Cr2AlC Coating Magnetron sputtering Composite target Heat treatment
摘 要:Polycrystalline Cr2AlC coatings were prepared on M38G superalloy using a two-step method consisting of magnetron sputtering from Cr-Al-C composite targets at room temperature and subsequent annealing at 620 ℃. Particularly, various targets synthesized by hot pressing mixture of Cr, Al, and C powders at 650-1000 ℃ were used. It was found that regardless of the phase compositions and density of the com- posite targets, when the molar ratio of Cr:Al:C in the starting materials was 2:1:1, phase-pure crystalline Cr2AlC coatings were prepared by magnetron sputtering and post crystallization. The Cr2AIC coatings were dense and crack-free and had a duplex structure. The adhesion strength of the coating deposited on M38G superalloy from the 800 ℃ hot-pressed target and then annealed at 620 ℃ for 20 h in Ar exceeded 82 ± 6 MPa, while its hardness was 12 ± 3 GPa.