Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

作     者：XIA CHEN MILAN M.MILOSEVIC DAVID J.THOMSON ALI Z.KHOKHAR YOHANN FRANZ ANTOINE F.J.RUNGE SAKELLARIS MAILIS ANNA C.PEACOCK GRAHAM T.REED 

作者机构：Optoelectronics Research Centre University of Southampton 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2017年第5卷第6期

页      面：97-101页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：Engineering and Physical Sciences Research Council(EPSRC)(EP/L00044X/1,EP/M022757/1) Wolfson Foundation Royal Society 

主　　题：Post-fabrication phase trimming of Mach Zehnder interferometers by laser annealing of germanium implanted waveguides MZI 

摘      要：We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach–Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.