Synthesis and Ceramic Conversion of Polysiloxazane to Silicon Oxynitride

作     者：Junbao ZHANG Tingquan LEI Guangwu WEN and Yu ZHOU School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China 

作者机构：Sch. of Mater. Sci. Harbin Inst. of Technol. Harbin 150001 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2001年第17卷第1期

页      面：3-4页

核心收录：

学科分类：081704[工学-应用化学] 07[理学] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 070301[理学-无机化学] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：POLYMERIC PRECURSOR DICHLOROMETHYLSILANE NITRIDATION XEROGELS 

摘      要：Amorphous silicon oxynitride powders have been obtained by pyrolysis of polysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000℃. The polysiloxazane is fabricated from ammonolysis of chloropolysiloxane that is produced by the hydrolysis of silicon tetrachloride. The conversion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental composition and X-ray diffraction analysis and SEM observation.