High-precision measurement of low reflectivity specular object based on phase measuring deflectometry

作     者：Yuxiang Wu Huimin Yue Yong Liu Yuxiang Wu;Huimin Yue;Yong Liu;State Key Laboratory of Electronic Thin Films and Integrated Devices School of Optoelectronic Information University of Electronic Science and Technology of China

作者机构：State Key Laboratory of Electronic Thin Films and Integrated Devices School of Optoelectronic Information University of Electronic Science and Technology of China 

出 版 物：《光电工程》 (Opto-Electronic Engineering)

年 卷 期：2017年第44卷第8期

页      面：772-780页

核心收录：

学科分类：0808[工学-电气工程] 080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：support by the National Nature Science Foundation of China (61421002  61327004) 

主　　题：光电工程 电学技术 测试 调整 

摘      要：Phase measuring deflectometry(PMD)is a robust,noncoherent technique for the characterization of specular *** measuring high specular reflectivity surface,PMD can deliver micron radian range local ***,when the measured surface has low specular reflectivity,the accuracy of the measured gradient is low since the captured fringe pattern shows low signal to noise *** phase error characteristics in PMD system when testing low reflectivity surfaces are *** analysis illustrates that the random phase error increases rapidly while the nonlinear error drops slowly with the decreasing of the tested surface *** order to attain high precision measurement of low reflectivity specular surface,a robust error reduction method based on wavelet de-noising is proposed to reduce the phase *** error reduction method is compared with several other normally used methods in both simulation and experiment *** method based on the wavelet de-noising shows better performance when measuring the low reflectivity specular surface.