The Efect of the Earthed Electrode Size on the Ignition Voltage of Low-Pressure RF Capacitive Discharge in Argon

作     者：A. A. AZOOZ M. A. AHMAD 

作者机构：Department of PhysicsCollege of ScienceMosul University Department of PhysicsCollege of EducationMosul University 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2013年第15卷第9期

页      面：881-884页

核心收录：

学科分类：0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 

主　　题：CCRF electrode size Paschen law RF plasma 

摘      要：The effect of the grounded electrode diameter on the ignition voltage using 13.56 MHz in argon gas is studied experimentMly. The results indicate a systematic decrease of the breakdown voltage with increasing electrode area for the same pd value. No multi-valued breakdown voltages are observed. The Paschen minimum is not affected by the electrode diameter as long as the parallel plane approximation is valid. A modified Paschen equation which takes into account indirect discharge via the chamber walls at high pd values gives reasonable fits to the experimental data.