Effect of temperature on pull-in voltage and nonlinear vibration behavior of nanoplate-based NEMS under hydrostatic and electrostatic actuations

作     者：Farzad Ebrahimi S.H.S.Hosseini 

作者机构：Department of Mechanical Engineering Faculty of Engineering Imam Khomeini International University qazvinIran 

出 版 物：《Acta Mechanica Solida Sinica》 (固体力学学报（英文版）)

年 卷 期：2017年第30卷第2期

页      面：174-189页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080101[工学-一般力学与力学基础] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：Small scale effect Nano electromechanical system Nonlinear vibration Temperature effect Pull in voltage 

摘      要：This paper deals with the study of the temperature effect on the nonlinear vibration behavior of nanoplate-based nano electromechanical systems（NEMS） subjected to hydrostatic and electrostatic actuations. Using Eringen＇s nonlocal elasticity and Gurtin–Murdoch theory, the nonlocal plate model is derived through Hamilton＇s principle. The governing equation which is extremely nonlinear due to the geometrical nonlinearity and electrostatic attraction forces is solved numerically using the differential quadrature method（DQM）. The accuracy of the present method is veriied by comparing the obtained results with the experimental data and those in the literature and very good agreement is obtained. Finally a comprehensive study is carried out to determine the inluence of temperature on the nonlinear vibration characteristics of NEMS made of two different materials including aluminum（Al）and silicon（Si） and some conclusions are drawn.