Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model

作     者：Chi SONG Xuejun ZHANG Xin ZHANG Haifei HU Xuefeng ZENG 

作者机构：Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China Key Laboratory of Optical System Advanced Manufacturing Technology Chinese Academy of Sciences Changchun 130033 China University of Chinese Academy of Sciences Beijing 100049 China 

出 版 物：《Photonic Sensors》 (光子传感器（英文版）)

年 卷 期：2017年第7卷第2期

页      面：171-181页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：This research is financially supported by the National Natural Science of China （NSFC） （61210015） and Youth Foundation of National Natural Science Foundation （61605202）. 

主　　题：Optics design and fabrication optics fabrication polishing 

摘      要：A rigid conformal （RC） lap can smooth mid-spatial-frequency （MSF） errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting toolspeed of 300 RPM were obtained.