A novel linear microprobe array for the fabrication of neural microelectrodes

作     者：ZHAO Shan Shan PEI Wei Hua ZHAO Hui WANG Yi Jun CHEN San Yuan CHEN Yuan Fang ZHANG He GUO Dong Mei GUI Qiang CHEN Hong Da 

作者机构：State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Institute for Neural Computation University of California San Diego 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2015年第58卷第2期

页      面：346-351页

核心收录：

学科分类：0810[工学-信息与通信工程] 1001[医学-基础医学(可授医学、理学学位)] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 10[医学] 

基　　金：supported the National Basic Research Program of China("973"Project)(Grant Nos.2011CB933203 and 2011CB933102) the National Hi-Tech Research and Development Program of China("863"Project)(Grant Nos.2012AA030308 and 2013AA032204) the National Natural Science Foundation of China(Grant Nos.61275200,61335010,61178051 and 61178082) the National Important Scientific Apparatus Developing Project(Grant No.2011YQ04008204) 

主　　题：LMPA regular spacing cleavage fracture V-groove 

摘      要：A novel linear microprobe array(LMPA)has been developed by a conventional microfabrication method from *** LMPA leverages the properties of conventional microwire with additional features of naturally formed regular *** the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’rear ends,the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the *** fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy(EIS)and in vivo *** SNR of the spikes recorded was 6.