Influence of substrate surface roughness on light scattering of TiO2 optical thin films

作     者：Toshinori Harada Hiroshi Murotani Shigeharu Matumoto Hiromitu Honda 

作者机构：Course of Electro Photo Optics Graduate School of Engineering Tokai University Japan Sincron Co. Ltd. Japan 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2013年第11卷第13期

页      面：83-86页

核心收录：

学科分类：08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

主　　题：Light scattering 

摘      要：Optical thin films are used in many optical elements; however, light scattering can be problematic. We investigate the effect of substrate surface roughness on the light scattering of optical thin films. The substrates are classified according to their surface roughness, from fine to very rough, and coated with a single TiO2 layer or a SiO2/TiO2 multilayer. The light scattering intensity increases as the substrate roughness increases. Scanning electron microscopy reveals that the number of nodules formed in the optical thin films increases with the substrate roughness, which affects the light scattering properties.