Application of the thermoelectric MEMS microwave power sensor in a power radiation monitoring system

作     者：高波 杨晶 蒋思 王德波 

作者机构：Nanjing University of Posts and Telecommunications Nanjing 210003 China 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2016年第37卷第8期

页      面：60-62页

核心收录：

学科分类：08[工学] 080202[工学-机械电子工程] 0804[工学-仪器科学与技术] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China(No.11304158) the Province Natural Science Foundation of Jiangsu(No.BK20140890) the Open Research Fund of the Key Laboratory of MEMS of Ministry of Education,Southeast University(No.3206005302) the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(Nos.NY213024,NY215139) 

主　　题：thermoelectric MEMS power sensor power radiation monitoring system 

摘      要：A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules： a data acquisition module, a data processing and display module, and a data sharing module. It can detect the power radiation in the environment and the date information can be processed and shared. The measured results show that the thermoelectric MEMS microwave power sensor and the power radiation monitoring system both have a relatively good linearity. The sensitivity of the thermoelectric MEMS microwave power sensor is about 0.101 mV/mW, and the sensitivity of the monitoring system is about 0.038 V/mW. The voltage gain of the monitoring system is about 380 times, which is relatively consistent with the theoretical value. In addition, the low-frequency and low-power module in the monitoring system is adopted in order to reduce the electromagnetic pollution and the power consumption, and this work will extend the application of the thermoelectric MEMS microwave power sensor in more areas.