Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator

作     者：WANG Songbai LEI Guangjiu BI Zhenhua H. GHOMI YANG Size LIU Dongping 王松柏;雷光玖;毕振华;H.GHOMI;杨思泽;刘东平

作者机构：College of Physics and Information EngineeringFuzhou UniversityFuzhou 350108China Southwestern Institute of PhysicsChengdu 610041China School of Physics and Materials EngineeringDalian Nationalities UniversityDalian 116600China Laser and Plasma Research InstituteShahid Beheshti UniversityEvinTehrarIran School of Physics and Mechanical&Electrical EngineeringXiamen UniversityXiamen 361005China 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2016年第18卷第9期

页      面：907-911页

核心收录：

学科分类：08[工学] 082701[工学-核能科学与工程] 0827[工学-核科学与技术] 

基　　金：supported by the National Magnetic Confinement Fusion Science Program of China(Nos.2011GB108011 and 2010GB103001) the Major International(Regional)Project Cooperation and Exchanges of China(No.11320101005) the Startup Fund from Fuzhou University(No.510071) 

主　　题：saturation ion current densities large-power RF generator outer/innerpuffing gas pressure ratio H- ion transformer model 

摘      要：An experimental investigation of the saturation ion current densities （Jions） in hydrogen inductively coupled plasma （ICP） produced by a large-power （2-32 kW） radio frequency （RF） generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental results show three stages： in the first stage （2-14 kW）, the electron temperature will rise with the increase of RF power in the ICP, thus, the Jions increases continually as the electron temperature rises in the ICP. In the second stage （14 20 kW）, as some H- ions lead to the mutual neutralization （MN）, the slope of Jio^s variation firstly decreases then increases. In the third stage （20-32 kW）, both the electronic detachment （ED） and the associative detachment （AD） in the ICP result in the destruction of H- ions, therefore, the increased amplitude of the Jions in the third stage is weaker than the one in the first stage. In addition, with the equivalent transformer model, we successfully Explain that the Jions at different radial locations in ICP has the same rule. Finally, it is found that the Jions has nothing to do with the outer/inner puffing gas pressure ratio, which is attributed to the high-speed movement of hydrogen molecules.