Design,fabrication and characterization of the X-ray supermirrors

作     者：WANG Zhanshan WANG Fengli ZHANG Zhong CHENG Xinbin QIN Shuji CHEN Lingyan 

作者机构：Institute of Precision Optical EngineeringDepartment of PhysicsTongji UniversityShanghai 20092China 

出 版 物：《Science China(Physics,Mechanics & Astronomy)》 (中国科学:物理学、力学、天文学(英文版))

年 卷 期：2005年第48卷第5期

页      面：559-574页

核心收录：

学科分类：07[理学] 08[工学] 

基　　金：supported by the National Natural Science Foundation of China(Grant No.60178023) the Shanghai Development Foundation of Science and Technology(Grant No.0352nm090) 

主　　题：X-ray supermirror magnetron sputter multilayer reflectivity. 

摘      要：The design,fabrication and characterization of the X-ray supermirrors are discussed in this *** the local optimization method of simplex algorithm and the global one of simulated annealing algorithm with different initial multilayer structures,we designed the broad angular band supermirrors with different grazing incidence angle intervals at the energy of 8.0 keV(the Kαline of Cu)and the broad energetic band supermirrors with different energy intervals at fixed grazing incidence *** fabricating techniques for depositing non-periodic multilayers are also *** W/C and W/Si supermirrors are deposited on silicon substrates and characterized by a high resolution X-ray D1 diffractometer from Bede Company,*** the interface roughness and the densities of the materials as independent variables,some measured reflectivity curves are fitted using the Debye-Waller factor with interface *** experimental results show that the optical performances of the fabricated supermirrors are in agreement with the designed ones.