High Efficiency Grating Coupler for Coupling between Single-Mode Fiber and SOI Waveguides

作     者：张灿 孙晶华 肖希 孙伟民 张晓峻 储涛 余金中 俞育德 ZHANG Can;SUN Jing-Hua;XIAO Xi;SUN Wei-Min;ZHANG Xiao-Jun;CHU Tao;YU Jin-Zhong;YU Yu-De

作者机构：College of ScienceHarbin Engineering UniversityHarbin 150001 State Key Laboratory on Integrated OptoelectronicsInstitute of SemiconductorsChinese Academy of SciencesBeijing 100083 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2013年第30卷第1期

页      面：99-102页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0704[理学-天文学] 0803[工学-光学工程] 

主　　题：SOI waveguide Efficiency 

摘      要：A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula *** 78.5%coupling efficiency(-1.05 dB)with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we *** grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.