The effect of anodizing temperature on the structure and electrical properties of Al-Ti composite oxide film

作     者：CHEN Jinju YANG Bangchao JIANG Meilian FENG Zhesheng 

作者机构：School of Micro-electronics and Solid ElectronicsUniversity of Electronics Science and Technology of ChinaChengdu 610054China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2005年第48卷第6期

页      面：612-621页

核心收录：

学科分类：08[工学] 0802[工学-机械工程] 

基　　金：This work was supported by the Science and Technology Foundation of UESTC of Young Scholars(Grant No.L0801301JX04018) 

主　　题：anodizing temperature Al-Ti composite oxide film structure electrical properties 

摘      要：The Al?Ti composite oxide films with high dielectric constant were prepared by hydrolysis precipitation and anodizing. The growth, structure and electrical properties of the Al?Ti composite oxide films formed at different anodizing temperatures from 25°C to 85°C have been studied by dissolution of anodic oxide films, Auger electron spectroscopy (AES), and electrical measurements. With the anodizing temperature increasing, the film growth rate increases, the structure of two layers in the Al?Ti composite oxide film converts into three layers, I–V characteristics change evidently, and the specific capacitance achieves a peak value at about 75°C. The local breakdown in the composite oxide films formed at 50°C occurs obviously, which may be contributed to the lowest leakage current and the highest withstanding voltage.