Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors

作     者：ZHANG Hui ZHANG Shu-Yi FAN Li 张辉;张淑仪;范理

作者机构：Laboratory of Modern AcousticsInstitute of AcousticsNanjing UniversityNanjing 210093 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2011年第28卷第11期

页      面：144-147页

核心收录：

学科分类：0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 070205[理学-凝聚态物理] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0702[理学-物理学] 

基　　金：by the National Basic Research Program of China under Grant No 2012CB921504 the National Natural Science Foundation of China under Grant Nos 11004099 and 11174142 the State Key Laboratory of Acoustics,Chinese Academy of Sciences 

主　　题：piezoelectric satisfy layered 

摘      要：The resonance vibrations of acoustic sensors with two layers of(11ˉ20)textured hexagonal piezoelectric films are *** the acoustic and electric fields satisfy a special match condition,*** phase variation of thickness shear mode(TSM)at each film equals𝜋,both piezoelectric layers with opposite polarization directions reduce the first TSM and generate the second TSM with higher frequency and a higher quality *** excited second TSM can increase the product of the operating frequency and the quality factor,which is useful for improving the mass sensitivity and resolution of acoustic ***,both of the piezoelectric films have larger thickness and decrease the risk of mechanical damage in device production processes.