Mechanical Properties of Polycrystalline TiN/TaN Multilayers

作     者：W.H.Soe and R.Yamamoto(Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan ) 

作者机构：Institute of Industrial Science University of Tokyo 7-22-1 Roppongi Minato-ku Tokyo 106 Japan 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：1997年第13卷第4期

页      面：245-248页

核心收录：

学科分类：081704[工学-应用化学] 07[理学] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 070301[理学-无机化学] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：TaN Mechanical Properties of Polycrystalline TiN/TaN Multilayers TiN nm 

摘      要：Polycrystalline TiN/TaN multilayers were grown by reactive magnetron sputtering on WC-Co sintered hard alloy Substrates. Multilayer structure and composition modulation amplitudes were studied using X-ray diffraction method. Hardness and elastic modulus were measured by nanoindentation tester. For A8.0 nm, hardness is lower than rule-of mixtures value of individual single layer, and increased rapidly with decreasing A, peaking at hardness values≈33% higher than that at A=4.3 nm. As a result of analysing the inclination of applied load for indenter displacement on P-h curve (△P/△h), this paper exhibits that the enhancement of the resistance to dislocation motion and elastic anomaly due to coherency strains are responsibie for the hardness change