VERTICAL NONCONTACT POSITIONING H_∞ ROBUST CONTROL FOR MAGNETICALLY LEVITATED SURFACE MOTOR

作     者：TAO Tao HAO Xiaohong MEI Xuesong JIANG Gedong ZHANG Dongsheng 

作者机构：School of Mechanical Engineering Xi＇an Jiaotog University Xi＇an 710049 China State Key Laboratory for Manufacturing Systems Engineering Xi＇an Jiaotong University Xi＇an 710049 China 

出 版 物：《Chinese Journal of Mechanical Engineering》 (中国机械工程学报（英文版）)

年 卷 期：2008年第21卷第1期

页      面：82-86页

核心收录：

学科分类：12[管理学] 1201[管理学-管理科学与工程(可授管理学、工学学位)] 08[工学] 0802[工学-机械工程] 080201[工学-机械制造及其自动化] 

基　　金：supported by National Natural Science Foundation of China (No. 50475091,No.50505035,No.50575176) National Basic Research Program of China (973 Program, No. 2005CB724106) New Century Excellent Person Support Plan of Ministry of Education of China (No. NCET-04-0935) 

主　　题：Magnetic levitation Surface motor Ultra-precision positioning Robust control 

摘      要：To fulfill the stringent requirement, super-precision positioning and ultra cleanness, a surface motor with the integrated chip fabrication equipment is constructed by using permanent magnets and electromagnet coils as primary actuating components. It consists of stator and mover, and the mover is isolated from the stator by the magnetic beating. The magnetic bearing in the stator is composed of eight air core electromagnet coils, the propulsion in the stator is composed of iron core and electromagnetic coils, and the mover is composed of NdFeB permanent magnets and levitated stage. Based on Lorentz law, some parameters, including permanent magnets dimensions, currents and levitation height, which may affect the stability, are analyzed and optimized. To improve the positioning accuracy in the vertical direction of the magnetic levitation surface motor, a robust controller is proposed using H∞ mixed sensitivity control theory. The simulation results show that by choosing appropriate weight functions, the controller can ensure the robustness of the closed loop system under the presence of uncertainties, and the H∞ robust controller is excellent for reducing steady error and increasing response speed.