Electro-optic tuning in ferroelectric capacitor with photonic crystal nanobeam cavity

作     者：Tongtong WANG Yong ZHANG Danyang YAO Zhi JIANG Dongxin TAN Jie WEN Qiyu YANG Xuetao GAN Yan LIU Yue HAO Genquan HAN 

作者机构：State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology School of MicroelectronicsXidian University Key Laboratory of Light Field Manipulation and Information Acquisition Ministry of Industry and Information TechnologyShaanxi Key Laboratory of Optical Information Technology School of Physical Science and TechnologyNorthwestern Polytechnical University Hangzhou Institute of Technology Xidian University 

出 版 物：《Science China(Information Sciences)》 (中国科学:信息科学(英文版))

年 卷 期：2025年

核心收录：

学科分类：08[工学] 0803[工学-光学工程] 

基　　金：supported by National Key R&D Program of China (Grant No. 2023YFB4402303) Fundamental Research Funds for the Central Universities(Grant No. YJSJ24020) National Natural Science Foundation of China (Grant Nos. 62090033, 62025402, 62274128, 92264202,62293522, 92364204) Zhejiang Provincial Natural Science Foundation of China (Grant No. LDT23F04023F04) Innovation Fund of Xidian University 

摘      要：Silicon photonics has provided a platform for the convergency of photonic devices and electronic circuits, facilitating the development of optical telecommunications and optical interconnects on chip[1]. As the basic building block of optical communication systems, electro-optic tuning is expected to be more compact, high bandwidth, energy efficient, and allow for CMOS-compatible fabrication in the future[2]. Resonator-based electro-optic tuning has attracted more and more interest due to the small footprint, enhanced light-matter interactions and high energy efficiency. Compared with microring and microdisk resonators, photonic crystal nanobeam cavities （PCNBCs） realize higher quality factors, stronger light-matter interactions, ultrasmall mode volume and a much larger free spectral range （FSR）[3].