Sensing Characteristics of A Precision Aligner Using Moire Gratings for Precision Alignment System

作     者：ZHOU Lizhong (Department of Electronic Engineering,Yangzhou University, Yangzhou 225009, China) Hideo Furuhashi Yoshiyuki Uchida (Department of Information Network Engineering,Aichi Institute of Technology, Toyota 470 0392, Japan) Received Aug. 17, 

出 版 物：《Chinese Journal of Lasers》 (中国激光(英文版))

年 卷 期：2001年第10卷第4期

页      面：17-22页

学科分类：070207[理学-光学] 07[理学] 0702[理学-物理学] 

主　　题：moire gratings sensing characteristics alignment accuracy 

摘      要：Sensing characteristics of a precision aligner using moire gratings for precision alignment sysem has been investigated. A differential moire alignment system and a modified alignment system were used. The influence of the setting accuracy of the gap length and inclination of gratings on the alignment accuracy has been studied experimentally and theoretically. Setting accuracy of the gap length less than 2.5μm is required in modified moire alignment. There is no influence of the gap length on the alignment accuracy in the differential alignment system. The inclination affects alignment accuracies in both differential and modified moire alignment systems.