Sensitivity to Combustible Gas for ZnO Thin Films

作     者：Tan, GL Wu, JA Wu, XJ 

作者机构：Dept. of Materials Science and Engineering Zhejiang University Hangzhou 310027 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：1997年第13卷第4期

页      面：302-305页

核心收录：

学科分类：081704[工学-应用化学] 07[理学] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 070301[理学-无机化学] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

主　　题：Zinc oxide 

摘      要：A fine polycrystalline ZnO thin film with 0.3 similar to 0.6 mu m grain size was obtained by sol-gel process and a consequential heat treatment at 500 degrees C. The process of preparing ZnO thin film was analysed. The sensitivity and conductivity of ZnO thin films as combustible gas (CO, CH4, H-2) sensor as well as the influence of catalyst and pH value of the precursor on its sensitivity were studied in detail. The structure characteristics of ZnO thin film by different process were investigated by X-ray diffraction, thermal analysis and photoelectron spectrometer. The atomic ratio of Zn to O on the surface of ZnO thin film was found to be 1.14:1 measured from XPS result. The conductivity of the thin film increases greatly when doped with Al3+ ion but decreases while doped with Na+ ion.