An Optical Pressure Sensor Based on MEMS

作     者：Tong Zhang Sheng Qiang Frank Lewis Yalin Wu Xiaozhu Chi 

作者机构：Harbin Institute of Technology Harbin 150001 China Automobile Electronic Engineering Technology Research and Development Center Harbin 150001 China The University of Texas at Arlington Arlington TX 76019 USA 

出 版 物：《稀有金属材料与工程》 (Rare Metal Materials and Engineering)

年 卷 期：2006年第35卷第A3期

页      面：476-478页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：supported by National Science Foundation of the U.S.,under fund cite NSF 03-512 supported by National‘863 Project'of China,under fund cite A05106AA5114 

主　　题：optical fiber pressure sensor MEMS 

摘      要：An optical fiber pressure sensor has been developed for the measurement in human *** sensing element is possessed of a membrane structure,which is fabricated by *** fabrication process includes anisotropic wet etching on the silicon *** the transmitting source and signal light,a multimode optical fiber 50/125 μm (core/clad)in diameter was *** intensity of the light reflected back into the fiber varies with the membrane deflection,which is s function of *** deflection of the membrane by applied pressure can be mathematically described.