Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

作     者：高伟民 ChristGlorieux 等 

作者机构：LaboratoriumvoorAkoestiekenThermischeFysicaDepartementNatuurkundeKatholiekeUniversiteitLeuvenCelestijnenlaan200DB-3001LeuvenBelgium LaboratoriumvoorAkoestiekenThermischeFysicaDepartementNatuurku 

出 版 物：《Chinese Physics B》 (中国物理B（英文版）)

年 卷 期：2002年第11卷第2期

页      面：132-138页

核心收录：

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：surface acoustic wave laser ultrasonics thin film inverse problem 

摘      要：We present a laser ultrasonic method to investigate a titanium nitride (TiN) coating specimen. The techniqueis based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space withthe presence of a thin layer. Due to the high efficiency of laser line-source excitation, we have been able to generateand detect a SAW with an excellent signal-to-noise ratio in a wide frequency band. An inverse fitting algorithm wasemployed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimentalSAW velocity dispersion curve.