Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating
Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating作者机构：Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology lnstititute of Microelectronics Chinese Academy of Sciences Beijing 100029
出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)
年 卷 期：2009年第26卷第9期
页 面：81-84页
核心收录：
学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学]
基 金：Supported by the National Basic Research Program of China under Grant No 2007C13935302 and the National Natural Science Foundation of China under Grant No 60825403
主 题：sea surface nonliear interaction numerical method
摘 要：Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-ray transmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.
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