Femtosecond laser-acoustic modeling and simulation for AlCu nanofilm nondestructive testing

作     者：Zhongyu WANG Jing MIN Jing HU Zehan WANG Xiuguo CHEN Zirong TANG Shiyuan LIU Zhongyu WANG;Jing MIN;Jing HU;Zehan WANG;Xiuguo CHEN;Zirong TANG;Shiyuan LIU

作者机构：State Key Laboratory of Intelligent Manufacturing Equipment and TechnologyHuazhong University of Science and TechnologyWuhan 430074China Optics Valley LaboratoryWuhan 430074China 

出 版 物：《Frontiers of Mechanical Engineering》 (机械工程前沿（英文版）)

年 卷 期：2024年第19卷第5期

页      面：59-71页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 070205[理学-凝聚态物理] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：funded by the National Natural Science Foundation of China(Grant Nos.52375541,52022034,52130504,and 62175075) the National Key Research and Development Plan of China(Grant No.2022YFF0709104) the Key Research and Development Plan of Hubei Province,China(Grant No.2020BAA8) the Interdisciplinary Research Program of Huazhong University of Science and Technology,China(Grant No.2023JCYJ047) the Innovation Project of Optics Valley Laboratory,China(Grant No.OVL2023PY003) 

主　　题：femtosecond photoacoustic nondestructive testing metal nanofilm ultrafast laser-matter interaction modeling and simulation semiconductor manufacturing 

摘      要：Photoacoustic detection has shown excellent performance in measuring thickness and detecting defects in metal ***,existing research on ultrafast lasers mainly focuses on using picosecond or nanosecond lasers for large-scale material processing and *** theoretical study of femtosecond laser sources for photoacoustic nondestructive testing(NDT)in nanoscale thin film materials receives much less emphasis,leading to a lack of a complete physical model that covers the entire process from excitation to *** this study,we developed a comprehensive physical model that combines the two-temperature model with the acoustic wave generation and detection *** the basis of the physical model,we established a simulation model to visualize the ultrafast lasermaterial interaction *** damage threshold of the laser source is determined,and the effect of key parameters(laser fluence,pulse duration,and wavelength)for AlCu nanofilms on the femtosecond photoacoustic NDT process is discussed using numerical results from the finite element *** numerical results under certain parameters show good agreement with the experimental results.