Development of silicon-based microelectrode array

作     者：LIN JianHui1,2,3, WU XiaoMing1,2,3,4, HUANG PengSheng1,2, FENG Lei5, REN TianLing1,2 & LIU LiTian1,2 1 Institute of Microelectronics, Tsinghua University, Beijing 100084, China 2 Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China 3 Yangtze Delta Region Institute of Tsinghua University, Jiaxing 314050, China 4 State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050 China 5 Department of Biomedical Engineering, Tsinghua University, Beijing 100084, China 

作者机构：Institute of Microelectronics Tsinghua University Tsinghua National Laboratory for Information Science and Technology 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2009年第52卷第8期

页      面：2391-2395页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 080402[工学-测试计量技术及仪器] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：Supported by the Natural Science Foundation of Zhejiang Province of China (Grant No. Y106448) State Key Laboratories of Transducer Technology (Grant No. SKT0506) 

主　　题：microelectrode array MEMS neural engineering 

摘      要：This paper introduces in details a kind of silicon-based microelectrode array. MEMS (micro-electromechanical system) technology is used in the fabrication of the microelectrode array, which is designed to perform signal recording and electrical stimulation for nerves in neural engineering. A simple fabrication process is developed. An improved model of microelectrodes is brought forward and successfully validated by the excellent match between circuit simulations and electrical measurements, including both magnitude and phase of microelectrode impedance. Compared with the simple one that is usually used, the improved model is believed to be an advance and more accurate. This modeling helps to improve the design of microelectrodes and understand the behavior of interface between electrode and cell. Furthermore, the microelectrode is proved to be a feasible tool for researches in neural engineering by successfully recording neural activities of sciatic nerve of a bullfrog.