Asymmetrical Fabry-Perot cavity slot micro-ring resonator and its sensing characteristics

作     者：CAO Qianqian LIU Chunjuan WU Xiaosuo SUN Xiaoli 曹倩倩;刘春娟;吴小所;孙晓丽

作者机构：School of Electronic and Information EngineeringLanzhou Jiaotong UniversityLanzhou 730070China 

出 版 物：《Journal of Measurement Science and Instrumentation》 (测试科学与仪器（英文版）)

年 卷 期：2024年第15卷第3期

页      面：292-301页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by Natural Science Foundation of Gansu Province(No.22JR5RA320) 

主　　题：micro-ring resonator(MRR) Fabry-Perot(FP)cavity Fano resonance refractive index sensing integrated optics silicon waveguide 

摘      要：To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR)based on asymmetric Fabry-Perot(FP)cavity was *** structure consisted of a pair of elliptical holes to form an FP cavity and a microring *** two different optical modes generated by the micro-ring resonator were destructively interfered to form a Fano line shape,which improved the system sensitivity while obtaining a higher quality factor and extinction *** transmission principle of the structure was analyzed by the transfer matrix *** transmission spectrum and mode field distribution of the proposed structure were simulated by the finite difference time domain(FDTD)method,and the key structural parameters affecting the Fano line shape in the device were *** simulation results show that the quality factor of the device reached 22037.1,and the extinction ratio was 23.9 *** analyzing the refractive index sensing characteristics,the sensitivity of the structure was 354 nm·RIU−1,and the detection limit of the sensitivity was 2×10−4 ***,the proposed compact asymmetric FP cavity slot micro-ring resonator has obvious advantages in sensing applications owing to its excellent performance.