Research on Ultimate Vacuum and Pumping Capacity of TiZrV Coated Pipe

作     者：Liu Jianlong Meng Jun Lin Xiaojian 

作者机构：不详 

出 版 物：《IMP & HIRFL Annual Report》 (中国科学院近代物理研究所和兰州重离子研究装置年报（英文版）)

年 卷 期：2018年第1期

页      面：262-263页

学科分类：08[工学] 082701[工学-核能科学与工程] 0827[工学-核科学与技术] 

主　　题：vacuum activation coated 

摘      要：TiZrV non-evaporable getters have been widely used to improve vacuum properties in the field of accelerators due to the excellent activation temperature[1].The ultimate vacuum and pumping capacity of TiZrV film tubes at different activation temperatures were investigated in the *** results show that the coated pipe is not activated at 180℃.The coated pipe is activated at 220℃and the ultimate vacuum is decreased by about 25%relative to the uncoated pipe,and the coated pipe enables a uniform pressure distribution therein.